Webconfiguration, High Density Inductive Coupled Plasma (HDICP) or Plasma Enhanced Chemical Vapor Deposition (PECVD) configuration. Used for advanced processing of single wafers or mounted parts (3” - 300mm). It also has multiple size batch capability. Small footprint at an affordable price. Etch applications: WebFeb 1, 2005 · In this paper, recent advancements related to a novel approach for fabricating low cost capacitive radio frequency microelectromechanical (RF MEMS) switches using directly photodefinable high dielectric constant metal oxides are discussed. In this approach, a radiation sensitive metal-organic precursor is deposited via spin coating and converted …
A low frequency electrical test set-up for the reliability assessment ...
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Photodefinable Metal Oxide Dielectrics II: Direct Fabrication of ...
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